Advances in process overlay : Alignment solutions for future technology nodesMEGENS, Henry; VAN HAREN, Richard; MUSA, Sami et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65181Z.1-65181Z.12, issn 0277-786X, isbn 978-0-8194-6637-2Conference Paper

The application of SMASH alignment system for 65-55nm logic-devicesMIYASAKA, M; SAITO, H; TAMURA, T et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65180H.1-65180H.10, issn 0277-786X, isbn 978-0-8194-6637-2Conference Paper